SYNUS Tech

SEMI OHT (Overhead Hoist Transport)

Use

安装在Rail底部的半导体工程间物流运送系统

Features

• Minimum Turning Radius
• Dual Rail Track
• OHS & OHT Port Access
• Active Slide Architecture
• Compact & Slim Design

Specification

• TypeFOUP, FOSB, Megazine, Tray, Cassette
• Payload8~20Kg
• SpeedStraight 3.5m/sec, Curve 0.7m/sec
• Elevator Speed0.9m/sec
• Curve RadiusR500mm (45˚, 90 ˚)
• CleanlinessClass 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

SEMI STOCKER

Use

是工程间物流搬送设备,具有FOUP的保管及运送功能

Features

• Superior Cycle Time
• Flexible Port Configuration
• Optimize Safety Interlock
• Contact-less Power Supply

Specification

• PayloadFOUP, FOSB, Cassette, Megazine, Tray
• Movement AxesX-axis, Z-axis, Turning, Forking
• Forking TimeForking Time: 2 sec
• CleanlinessFab -Class 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

Bank STOCKER

Use

Wafer Test

• Bank(Wafer sorting / Split, Merge)
• Storing & transport t in bank process during PKG&Test

Features

• Twin S-Master
• Storing over 1,000 cell
• Sorter Docking

Specification

• PayloadFOUP, FOSB
• Movement AxesX-axis, Z-axis, Turning, Forking
• Tact Time12 sec (Forking Time: 2 sec)
• CleanlinessClass 10@0.3㎛(Anti-Particle Design)

SEMI AGV (Automated Guided Vehicle)

Use

在半导体工程中, 把FOUP及Cassette 等运送物品自动运送到 Stocker 或EQ的设备

Features

• Excellent & Flexible Delivery System
• Direct Interface with Process Equip or Buffers

Specification

• PayloadMax. 20Kg
• Use to Handle TypeFOUP, FOSB, Cassette, Megazine, Tray, etc.
• Load/Unloading Time25~30sec
• Traveling VelocityMax. 56m/min
• CleanlinessClass 10@0.1㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

MCS (Material Control System)

Use

通过探索物流设备间最佳路径,控制从MES收到的转运命令,对个别物流设备的转运进行实时监控,实现Full Automation

Features

• 对工程内AMHS 装备及 Material实时监控
• 支持SEMI的标准(SECS, GEM, Stocker-SEM, IB-SEM)
• 根据工程的状况有效Dynamic Routing
• 适用最佳运送路径探索(Shortest Path)算法
• 为分散负荷的 Load Balancing
• OS内独立的 J2EE Platform
• Run-Time Patch
• Active-Active的结构, 可对应 Auto Failover
• 支持多样的DBMS 及 Middleware

Specification

• 对应设备OHT, Stocker, OHB, Lift, AGV
• ProtocolIB-SEM / Stocker-SEM
• AutoFailoverActive-Active
• Business LogicBPEL
• 扩展性多样的 Host / AMHS结合方便

SEMI HT (High Speed Tower)

Use

安装在半导体工程中有层间或段差区域, 把FOUP上下运送的设备

Features

• Double Transport(2 FOUP) System
• Short Cycle Time
• Fast Moving Speed
• Fast Cargo(FOUP, FOSB) System Between Multi Floor

Specification

• Payload300mm FOUP, FOSB
• Height25 ~ 60m
• Up/Down SpeedMax. 250m/min
• CleanlinessFab -Class 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

Conveyor

Use

FOUP及卡匣水平运送的设备, 且当Buffer可以装载物品的物流系统 System

Features

• Flexible with Module Unit
• Dual Belt for Minimum Tray Contact
• Miniaturization / weight lightening

Specification

• Driving MethodInduction Motor / Inverter Control
• SpeedMax. 30m/min
• Drive(Turn)Servo Motor
• Turn Speed 5sec / 90º, 8sec / 180º
• Traveling Speed 15sec @ Stroke 1435mm