SYNUS Tech

Stocker

Use

工程之间的物流搬送系统，负责EQ之间的Cassette运送

Features

• Fast, Efficient Storage and Retrieval
• AGV/MGV/OHS Compatible I/O Port
• SECS/HSMS/GEM Compatible
• Contact-less Power Supply

Specification

• PayloadMax. 2,000kg
• SpeedMax. 210m/min
• Forking Time7 sec ~ 12 sec
• CleanlinessClass 10@0.1㎛(Anti-Particle Design)

OHCV (Curved)

Use

为了高效利用空间轨道安装在设备上部, Stocker之间搬送卡匣的物流设备

Features

• Application of Curved Rail
• educing Number of Carriage
• Short Cycle Time
• Easy to Configure Layout

Specification

• PayloadMax. 2,000kg
• SpeedMax. 180m/min
• Power SupplyContact-less Power Supply
• Cleanliness Cleanliness Class 10@0.1㎛(Anti-Particle Design)

OHT (Overhead Hoist Transport)

Use

为了高效利用空间安装在天花板下面, 在距离长或运送量多的区域把物料直接送到设备上的物流设备

Features

• Direct Interface With Stocker To Process
• Equipment or Buffers
• Rail TypeSingle Rail
• Routing DeviceTurn Table/Rail Shifter
• Use For Cell To Module Transfer

Specification

• PayloadMax. 600kg
• Traveling VelocityMax. 180m/min
• Hoisting Speed Contact-less Power Supply
• Gripper Base

RGV (Rail Guided Vehicle)

Use

工程设备 Stocker, Buffer之间随着轨道运送卡匣的设备

Features

• Excellent Substitute for AGV System
• Direct Interface with Process Equip. or Buffers

Specification

• PayloadMax. 2,000kg
• SpeedMax. 210m/min
• HForking Time 7 sec ~ 12 sec
• Cleanliness Class 10@0.1㎛(Anti-Particle Design)

AGV (Automated Guided Vehicle)

Use

工程设备Stocker跟Buffer之间独立运送的无人运送设备

Features

• Excellent & Flexible Delivery System
• Direct Interface with Process Equip. or Buffers
• Steering Wheel Drive
• Auto Charging System
• SCARA or Slide Fork

Specification

• Payload100 ~ 1,500kg
• SpeedMax. 60m/min
• Load Time15 sec ~ 32 sec
• CleanlinessFab -Class 10@0.1㎛(Anti-Particle Design)
  Pkg -Class 1000@0.5㎛(Anti-Particle Design)

Clean Lift

Use

FPD工程中在层间运送Cassette的设备

Features

• AGV/RGV/OHCV/STK Compatible I/O Port
• High Efficiency
• Optimize Safety Interlock

Specification

• PayloadMax. 3,000kg
• SpeedMax. 120m/min
• StrokeMax. 97m
• CleanlinessClass 10@0.1㎛(Anti-Particle Design)

OHS (Over Head Shuttle)

Use

为了高效利用空间设在天花板下安装轨道,在距离长或运送量多的区域把卡匣直接送到设备上的物流设备

Features

• Minimum Curve Radius
• Compatible with High Cleanliness
• High Efficiency
• Compact and Slim Design

Specification

• PayloadMax. 2,000kg
• Traveling VelocityMax. 210m/min(curve 45m/min)
• CleanlinessClass 10 @0.1㎛(with Exhaust Filter)