SYNUS Tech

SEMI OHT (Overhead Hoist Transport)

Use

Material transport system between semiconductor processes installed under the rail

Features

• Minimum Turning Radius
• Dual Rail Track
• OHS & OHT Port Access
• Active Slide Architecture
• Compact & Slim Design

Specification

• TypeFOUP, FOSB, Megazine, Tray, Cassette
• Payload8~20Kg
• SpeedStraight 3.5m/sec, Curve 0.7m/sec
• Elevator Speed0.9m/sec
• Curve RadiusR500mm (45˚, 90 ˚)
• CleanlinessClass 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

SEMI STOCKER

Use

Inter-process material transport system with FOUP storage and transport function

Features

• Superior Cycle Time
• Flexible Port Configuration
• Optimize Safety Interlock
• Contact-less Power Supply

Specification

• PayloadFOUP, FOSB, Cassette, Megazine, Tray
• Movement AxesX-axis, Z-axis, Turning, Forking
• Forking TimeForking Time: 2 sec
• CleanlinessFab -Class 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

Bank STOCKER

Use

Wafer Test

• Bank(Wafer sorting / Split, Merge)
• Storing & transport t in bank process during PKG&Test

Features

• Twin S-Master
• Storing over 1,000 cell
• Sorter Docking

Specification

• PayloadFOUP, FOSB
• Movement AxesX-axis, Z-axis, Turning, Forking
• Tact Time12 sec (Forking Time: 2 sec)
• CleanlinessClass 10@0.3㎛(Anti-Particle Design)

SEMI AGV (Automated Guided Vehicle)

Use

Equipment that automatically conveys conveyed goods such as FOUP, Cassette, etc. to Stocker and EQ equipment during semiconductor process

Features

• Excellent & Flexible Delivery System
• Direct Interface with Process Equip or Buffers

Specification

• PayloadMax. 20Kg
• Use to Handle TypeFOUP, FOSB, Cassette, Megazine, Tray, etc.
• Load/Unloading Time25~30sec
• Traveling VelocityMax. 56m/min
• CleanlinessClass 10@0.1㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

MCS (Material Control System)

Use

By finding the shortest path between material facilities received from MES, it’s to realize full automation through real-time monitoring of control transport of each material facility

Features

• Real-time monitor in-house transport equipment for AMHS equipment and materials
• Support SEMI standard (SECS, GEM, Stocker-SEM, IB-SEM)
• Efficient Dynamic Routing according to factory state
• Apply the Shortest Path
• Load Balancing
• J2EE Platform independent on OS
• Run-Time Patch
• Respond to Auto Failover Active-Active structure
• Support various DBMS and Middleware

Specification

• Correspondence equipmentOHT, Stocker, OHB, Lift, AGV
• based protocolIB-SEM / Stocker-SEM
• Auto FailoverActive-Active
• Business LogicBPEL-based
• ScalabilityEasy integration with various Host / AMHS

SEMI HT (High Speed Tower)

Use

Equipment that vertically conveys FOUP at inter- or intra-layer level during the semiconductor process

Features

• Double Transport(2 FOUP) System
• Short Cycle Time
• Fast Moving Speed
• Fast Cargo(FOUP, FOSB) System Between Multi Floor

Specification

• Payload300mm FOUP, FOSB
• Height25 ~ 60m
• Up/Down SpeedMax. 250m/min
• CleanlinessFab -Class 10@0.3㎛(Anti-Particle Design)
  Pkg- Class 1000@0.5㎛(Anti-Particle Design)

Conveyor

Use

Material system that transports FOUP, Cassette, etc. horizontally and can also load them as a buffer

Features

• Flexible with Module Unit
• Dual Belt for Minimum Tray Contact
• Miniaturization / weight lightening

Specification

• Driving MethodInduction Motor / Inverter Control
• SpeedMax. 30m/min
• Drive(Turn)Servo Motor
• Turn Speed 5sec / 90º, 8sec / 180º
• Traveling Speed 15sec @ Stroke 1435mm